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Numerical simulation and mechanism analysis of subsurface microcrack detection in silicon wafers using nonlinear Lamb waves
HU Lanyi, YIN Shenxin, XU Caibin, ZHAO Youxuan, DENG Mingxi
Journal of Shaanxi Normal University(Natural Science Edition) . 2026, (2): 11 -18 .  DOI: 10.15983/j.cnki.jsnu.2026209

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