Numerical simulation and mechanism analysis of subsurface microcrack detection in silicon wafers using nonlinear Lamb waves

HU Lanyi, YIN Shenxin, XU Caibin, ZHAO Youxuan, DENG Mingxi

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Journal of Shaanxi Normal University(Natural Science Edition) ›› 2026, Vol. 54 ›› Issue (2) : 11-18. DOI: 10.15983/j.cnki.jsnu.2026209

Numerical simulation and mechanism analysis of subsurface microcrack detection in silicon wafers using nonlinear Lamb waves

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2026, 54(2): 11-18 https://doi.org/10.15983/j.cnki.jsnu.2026209

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