Influence of magnetron sputtering parameters on the growth of barium strontium titanate thin films and dielectric properties

YANG Jia, ZHANG Yunying, XIE Xiaokang, BIAN Xiaobing, ZHOU Jianping

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Journal of Shaanxi Normal University(Natural Science Edition) ›› 2016, Vol. 44 ›› Issue (6) : 26-30.

Influence of magnetron sputtering parameters on the growth of barium strontium titanate thin films and dielectric properties

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