Effect of RFmagnetron sputtering parameters on the growth and dielectric property of BST thin film

XIE Xiaokang, GOU Yuanyuan, YANG Jia, BIAN Xiaobing, ZHOU Jianping

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Journal of Shaanxi Normal University(Natural Science Edition) ›› 2014, Vol. 42 ›› Issue (5) : 37-42.

Effect of RFmagnetron sputtering parameters on the growth and dielectric property of BST thin film

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