Comparisons between ZnO thin films fabricated by RF-magnetron sputtering and Electron-beam evaporation

GAO Li, ZHANG Jian-min

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Journal of Shaanxi Normal University(Natural Science Edition) ›› 2009, Vol. 37 ›› Issue (3) : 23-27.

Comparisons between ZnO thin films fabricated by RF-magnetron sputtering and Electron-beam evaporation

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