非线性Lamb波检测硅片亚表面微裂纹的数值仿真与机理分析
胡兰艺, 尹莘新, 许才彬, 赵友选, 邓明晰
Numerical simulation and mechanism analysis of subsurface microcrack detection in silicon wafers using nonlinear Lamb waves
HU Lanyi, YIN Shenxin, XU Caibin, ZHAO Youxuan, DENG Mingxi
陕西师范大学学报(自然科学版)
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2026, (2): 11
-18
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DOI: 10.15983/j.cnki.jsnu.2026209
