磁控溅射参数对钛酸锶钡薄膜生长及介电性能的影响
杨佳,张运英,谢晓康,边小兵,周剑平
Influence of magnetron sputtering parameters on the growth of barium strontium titanate thin films and dielectric properties
YANG Jia, ZHANG Yunying, XIE Xiaokang, BIAN Xiaobing, ZHOU Jianping
陕西师范大学学报(自然科学版)
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2016, (6): 26
-30
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